A Piezoelectric Micromachined Ultrasonic Transducer Using Piston-Like Membrane Motion

Micromachined piezoelectric ultrasonic transducer with ultra-wide frequency bandwidth

Ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer array integrated with complementary metal oxide semiconductor electronics

Chemical vapor detection using a capacitive micromachined ultrasonic transducer.

Distributed sensing of gas-phase chemicals using highly sensitive and inexpensive sensors is of great interest for many defense and consumer applications. In this paper we present ppb-level detection of dimethyl methylphosphonate (DMMP), a common simulant for sarin gas, with a ppt-level resolution using an improved capacitive micromachined ultrasonic transducer (CMUT) as a resonant chemical sen...

Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducer Arrays

Air-coupled piezoelectric micromachined ultrasound transducer arrays, operating at ~190 kHz, have been fabricated utilizing an aluminum nitride piezoelectric layer. Improved fabrication processes have reduced the frequency variation seen in our previous work with single transducers resulting in arrays of transducers with resonant frequencies (fn) that match within the fractional half-power band...

Medical imaging using capacitive micromachined ultrasonic transducer arrays.

We are investigating the use of capacitive micromachined ultrasonic transducers (cMUT's) for use in medical imaging. We propose an ultrasound probe architecture designed to provide volumetric ultrasound imaging from within an endoscope channel. A complete automated experimental system has been implemented for testing the imaging performance of cMUT arrays. This PC-based system includes custom-d...